Electrostatically actuated gas valve

A gas valve comprising:

• a valve body comprising a gas inlet, a gas outlet, and a conduit connecting the gas inlet and the gas outlet, the conduit comprising a first flow chamber, a second flow chamber and a third flow chamber;
• a first electrostatic diaphragm valve disposed between the first flow chamber and the second flow chamber;
• a second electrostatic diaphragm valve disposed between the second flow chamber and the third flow chamber;
• and
• a pressure sensor in fluid communication with the gas outlet.

A gas valve comprising:

• a first flow chamber;
• a second flow chamber;
• a first main valve positioned between the first flow chamber and the second flow chamber, wherein the first main valve is opened by a pressure differential across the first main valve;
• and
• a first electrostatically controlled valve for controlling the pressure differential across the first main valve.