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US 2006/0137610 A1Published application
Plasma processing apparatus with insulated gas inlet pore
AssigneeASM Japan K.K.
InventorsYu Yoshizaki, Ryu Nakano
Life of this patent
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Abstract
A plasma processing apparatus includes: a reaction chamber; two electrodes provided inside the reaction chamber for generating a plasma therebetween, wherein at least one of the electrodes has at least one gas inlet pore through which a gas is introduced into the reaction chamber; and a gas inlet pipe coupled to the gas inlet pore for introducing the gas into the reaction chamber. The gas inlet pipe is grounded and insulated from the gas inlet pore, wherein an insulation member is placed inside the gas inlet pipe and the gas inlet pore.
Claims25
A plasma processing apparatus comprising:
- a reaction chamber;
- two electrodes provided inside the reaction chamber for generating a plasma therebetween, wherein at least one of the electrodes has at least one gas inlet pore through which a gas is introduced into the reaction chamber;
- and
- a gas inlet pipe coupled to the gas inlet pore for introducing the gas into the reaction chamber, said gas inlet pipe being grounded and insulated from the gas inlet pore,
- wherein an insulation member is placed inside the gas inlet pipe and the gas inlet pore.
2 more elements
A plasma processing apparatus comprising:
- a reaction chamber;
- two electrodes provided inside the reaction chamber for generating a plasma therebetween, wherein at least one of the electrodes has at least one gas inlet pore through which a gas is introduced into the reaction chamber;
- a gas inlet pipe coupled to the gas inlet pore for introducing the gas into the reaction chamber;
- and
- an insulator having a through-hole connected between the gas inlet pipe and the gas inlet pore of the electrode,
- wherein the gas inlet pipe, the insulator, and the gas inlet pore are connected to form a gas passage inner surface constituted by an inner wall of the gas inlet pipe, an inner periphery of the through-hole of the insulator, and an inner periphery of the gas inlet pore, said gas passage inner surface being insulated.
3 more elements
Dependencies are inferred from the claim text.