Combination of showerhead and temperature control means for controlling the temperature of the showerhead, and deposition apparatus having the same

An apparatus for forming a layer on a substrate, comprising:

• a processing chamber in which a process of forming a layer on a substrate is performed;
• a stage disposed in the processing chamber and on which the substrate to be processed is supported;
• a gas supplying unit including a source of a reaction gas used to form the layer;
• a showerhead disposed in an upper portion of the processing chamber and connected to the gas supplying unit so as to receive gas therefrom, the shower head having a bottom plate facing the stage and defining a plurality of spray openings through which gas supplied by the gas supplying unit is sprayed from the showerhead;
• a first heater disposed on the showerhead so as to heat the showerhead;
• and
• a heat dissipation plate that contacts a portion the showerhead to absorb heat from the showerhead, said first heater being disposed between the bottom plate of the showerhead and the heat dissipation plate.