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US 2006/0137461 A1Published application
Pressure sensor with integrated structure
AssigneeOLIVETTI I-JET S.p.A.
InventorsPaolo Bellini, Renato Conta
Life of this patent
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Abstract
Pressure sensor with an integrated structure comprising a support (33, 133, 233) and a silicon die (11), which lies substantially on the same plane as the upper surface (37, 137, 237) of the support and is integrated in a seat (34, 134, 234) made in the thickness of the support. On the inside face (23) of the die (11), in contact with the fluid the pressure of which has to be measured, is a protective layer.
Claims12
Pressure sensor with an integrated structure comprising:
- a silicon die, having an upper edged, an inner face, and an outer face on which piezoresistors are mounted,
- a support having an upper surface, and a seat suitable for containing the die,
- a container suitable for implementation in such a way as to put the die in contact with the fluid the pressure of which has to be measured, wherein said die is integrated in said seat, made in the thickness of the support.
Dependencies are inferred from the claim text.