Pressure measuring device for vacuum systems
AssigneeCentrotherm Photovoltaics AG
InventorsHarald Wanka, Johann Reichart, Hans-Peter Voelk
Life of this patent
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Abstract
A pressure-measuring device is configured for use in vacuum systems, which are used for surface coating or modification of objects and/or substrates in an inner receptacle inside a processing chamber. Elastic elements or portions are fabricated in the inner receptacle. The pressure-measuring device includes distance-measuring elements designed to measure the deformation of the elastic elements of the inner receptacle. The deformation measurements are related to the pressure in the inner receptacle. The pressure-measuring device provides a continuous and secure determination of the pressure.
Claims8
1-7. (canceled)
A pressure-measuring device for vacuum systems in which an inner receptacle is disposed in an outer processing chamber, the inner receptacle defining a reaction space for processing substrates, the pressure-measuring device comprising:
- an elastic element disposed in the inner receptacle, the elastic element having a defined elasticity;
- and
- a deformation-measurement element associated with the elastic element, whereby the elastic portion's deformation, which is related to a pressure in the inner receptacle, is measured.
The pressure-measuring device of claim 1 wherein the deformation-measurement element is configured to measure a distance.
The pressure-measuring device of claim 1 wherein the deformation-measurement element comprises a laser.
The pressure-measuring device of claim 1 wherein the deformation-measurement element comprises a mechanical probe.
The pressure-measuring device of claim 1 wherein the deformation-measurement element comprises at least one of a capacitive sensor and an inductive sensor.
The pressure-measuring device of claim 1 that is configured to determine a pressure difference from a measured deformation of the elastic portion when the inner receptacle and the outer processing chamber are at different pressures.
The pressure-measuring device of claim 1, further comprising a pressure gauge for measurement of the pressure in the processing chamber.
Dependencies are inferred from the claim text.