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US 2006/0137453 A1Published application
Sensing apparatus
AssigneeDelta Electronics, Inc.
InventorsTsung-Ying Wu, Tai-Kang Shing
Life of this patent
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Abstract
A sensing apparatus utilizing film bulk acoustic resonators (FBARs). The film bulk acoustic resonator has a bulk acoustic wave velocity (Vb) and a corresponding resonant frequency (f). When the FBAR is subjected to a force such as acceleration, g-force or an air pressure, the bulk acoustic wave velocity changes to obtain a frequency downshift (Δf) in response to deformation caused by the force. A magnitude of the force is then obtained by calculating the frequency downshift (Δf).
Claims20
A sensing apparatus for measuring a force, comprising:
- a film bulk acoustic resonator (FBAR) having a bulk acoustic wave velocity (Vb) and a corresponding resonant frequency (f);
- wherein when the FBAR is subjected to the force, the bulk acoustic wave velocity and the resonant frequency change to obtain a frequency downshift (Δf) in response to deformation caused by the force, and a magnitude of the force is obtained by calculating the frequency downshift.
A sensing apparatus comprising:
- an impedance sensor;
- a film bulk acoustic resonator (FBAR) electrically connected to the impedance sensor;
- and
- a matching circuit for adjusting an impedance between the film bulk acoustic resonator and the impedance sensor;
- wherein the sensitivity of the impedance sensor is increased by a high operating frequency of the film bulk acoustic resonator.
2 more elements
A sensing apparatus comprising:
- a film bulk acoustic resonator (FBAR) having a bulk acoustic wave velocity (Vb) and a corresponding resonant frequency (f);
- and
- a chemical or biochemical sensitive substance disposed on the film bulk acoustic resonator;
- wherein if a tested object reacts with the chemical or biochemical sensitive substance, a weight of the chemical or biochemical sensitive substance is changed, and the force is generated so as to obtain chemical or biochemical characteristics of the tested object.
1 more element
Dependencies are inferred from the claim text.