Method and apparatus for measuring film thickness and film thickness growth
AssigneeTangidyne Corporation
InventorScott Grimshaw
Life of this patent
Estimating the term…
Abstract
A device for measuring thickness and/or rate of thickness increase of a film comprises at least one piezoelectric element, and first and second electrodes in contact with the piezoelectric element. A method of measuring thickness and/or rate of thickness increase of a film comprises applying a voltage across a piezoelectric element from a first electrode to a second electrode, thereby causing the piezoelectric element to vibrate, and measuring the rate of vibration of the piezoelectric element. Heat may be applied to the piezoelectric element. The piezoelectric element may be formed of quartz crystal, e.g., IT-cut or near-IT-cut.
Claims16
A device for measuring the thickness of a film and/or the rate of increase of the thickness of a film, comprising:
- at least one piezoelectric element;
- a first electrode, said first electrode being in contact with at least a first region of said piezoelectric element;
- a second electrode, said second electrode being in contact with at least a second region of said piezoelectric element, said second region being spaced from said first region;
- and
- a heater which can heat said piezoelectric element.
6-7. (canceled)
A device for measuring the thickness of a film and/or the rate of increase of the thickness of a film, comprising:
- at least one piezoelectric element, said piezoelectric element comprising IT-cut or near-IT-cut quartz crystal;
- a first electrode, said first electrode being in contact with at least a first region of said piezoelectric element;
- and
- a second electrode, said second electrode being in contact with at least a second region of said piezoelectric element, said second region being spaced from said first region.
9-12. (canceled)
A method of measuring the thickness of a film and/or the rate of increase of the thickness of a film, comprising:
- applying a voltage across a piezoelectric element from a first electrode to a second electrode, thereby causing said piezoelectric element to undergo vibration, said first electrode being in contact with a first region of said piezoelectric element, said second electrode being in contact with a second region of said piezoelectric element;
- applying heat to said piezoelectric element;
- and
- measuring a rate of said vibration of said piezoelectric element.
20-36. (canceled)
Dependencies are inferred from the claim text.