Apparatus and method for supplying liquid and apparatus for processing substrate

A substrate processing apparatus for processing a substrate, comprising:

• a first conduit through which a first liquid flows;
• a second conduit through which a second liquid flows, said second conduit connected to said first conduit;
• a liquid supply apparatus installed on an upstream side of said second conduit for supplying said second liquid;
• and
• a process bath, located in a downstream side of a connected point of said first conduit and said second conduit, for storing a processing liquid which is a mixture of said first liquid and said second liquid, in which a substrate being dipped, wherein
• said liquid supply apparatus comprises
• a pump mechanism for pumping out said second liquid to a conduit connected to said second conduit by applying pressure to a flexible chamber to reduce a volume of said flexible chamber;
• a flowmeter placed in a downstream side of said pump mechanism for measuring a flowrate of said second liquid flowing through said conduit;
• and
• a controller for sending an electrical signal to said pump mechanism, said electrical signal controlling pressure applied to said flexible chamber so that said flowrate of said second liquid flowing through said conduit is adjusted to a predetermined flowrate on the basis of a flowrate of said second liquid obtained by said flowmeter.

A substrate processing apparatus for processing a substrate, comprising:

• a substrate holding part for holding a substrate;
• a first conduit through which a first liquid flows;
• a second conduit through which a second liquid flows, said second conduit connected to said first conduit;
• a liquid supply apparatus installed on an upstream side of said second conduit for supplying said second liquid;
• and
• a processing liquid supply part, located in a downstream side of a connected point of said first conduit and said second conduit, for supplying a processing liquid which is a mixture of said first liquid and said second liquid to said substrate, wherein
• said liquid supply apparatus comprises
• a pump mechanism for pumping out said second liquid to a conduit connected to said second conduit by applying pressure to a flexible chamber to reduce a volume of said flexible chamber;
• a flowmeter placed in a downstream side of said pump mechanism for measuring a flowrate of said second liquid flowing through said conduit;
• and
• a controller for sending an electrical signal to said pump mechanism, said electrical signal controlling pressure applied to said flexible chamber so that said flowrate of said second liquid flowing through said conduit is adjusted to a predetermined flowrate on the basis of a flowrate of said second liquid obtained by said flowmeter.

A liquid supply method for supplying a liquid, comprising the steps of:

• a) storing a liquid supplied from a liquid supply source in a flexible chamber by expanding said flexible chamber to increase a volume of said flexible chamber in a pump mechanism;
• and
• b) pumping out said liquid to a conduit by applying pressure to said flexible chamber to reduce said volume of said flexible chamber, wherein said step b) comprises
• b1) measuring a flowrate of said liquid flowing through said conduit in a downstream side of said pump mechanism;
• and
• b2) controlling pressure applied to said flexible chamber so that said flowrate of said liquid flowing through said conduit is adjusted to a predetermined flowrate on the basis of said flowrate measured in said step b1).