Method of testing using compliant contact structures, contactor cards and test system
AssigneeMicron Technology, Inc.
InventorsCharles Watkins, Kyle Kirby
Life of this patent
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Abstract
A compliant contact structure and contactor card for operably coupling with a semiconductor device to be tested includes a substantially planar substrate with a compliant contact formed therein. The compliant contact structure includes a portion fixed within the substrate and at least another portion integral with the fixed portion, laterally unsupported within a thickness of the substrate and extending beyond a side thereof. Dual-sided compliant contact structures, methods of forming compliant contact structures, a method of testing a semiconductor device and a testing system are also disclosed.
Claims3
A method of testing a semiconductor substrate, comprising:
- placing a substantially planar semiconductor substrate adjacent and substantially parallel to a substantially planar substrate of a contactor card;
- aligning at least one contact pad of the substantially planar semiconductor substrate with a compliant contact of a compliant contact structure carried by the contactor card, the compliant contact structure including:
- the compliant contact, including:
- a portion fixed within a portion of the substrate;
- and
- at least one laterally unsupported portion integral with the portion fixed within the portion of the substrate, within a thickness of the substrate and extending beyond one side thereof;
- pressing the semiconductor substrate against the contactor card substantially transversely to a plane of the substrate of the contactor card to cause an end of the at least one laterally unsupported portion extending beyond the one side of the substrate of the contactor card to contact the at least one contact pad of the semiconductor substrate and induce flexure of the at least one laterally unsupported portion;
- and
- applying at least one test signal from a tester operably coupled to the contactor card through the compliant contact.
Dependencies are inferred from the claim text.