Fluorinated cyclic compound, polymerizable fluoromonomer, fluoropolymer, resist material comprising the same, and method of forming pattern with the same

A fluorine-containing cyclic compound represented by the following formula (3) or (4).

A fluorine-containing cyclic compound represented by one of the following formulas (5) to (8).

A fluorine-containing cyclic compound represented by one of the following formulas (13) to (16).

A fluorine-containing cyclic compound represented by one of the following formulas (17) to (20).

A fluorine-containing cyclic compound represented by one of the following formulas (21) to (24).

A fluorine-containing cyclic compound having at least one hydroxyl group or hexafluorocarbinol group and represented by the following structural formula (25) or (26),

• wherein, in the structural formulas (25) and (26), “m+n” represents an integer of 1 to 4;
• wherein the hydroxyl group and the hexafluorocarbinol group contained in the formula may be partially or entirely protected;
• and wherein the protecting group is a straight-chain, branched or cyclic hydrocarbon group of a carbon number of 1-25 or a group containing an aromatic hydrocarbon group and may contain at least one of fluorine atom, oxygen atom, nitrogen atom and carbonyl bond.

A fluorine-containing polymerizable monomer represented by one of the following formulas (30) to (33).

A fluorine-containing polymerizable monomer represented by one of the following formulas (34) to (37),

• wherein, in the formulas (34) to (37), R28 represents a hydrogen, methyl group, fluorine, or trifluoromethyl group.