Cleaning and rinsing method

Abstract

The present invention provides a method for cleaning and rinsing an article, with excellent cleaning and rinsing performance. The present invention provides a method for cleaning and rinsing an article, characterized by comprising a cleaning step of contacting an article having a contaminant attached, with a hydrocarbon solvent containing an aromatic hydrocarbon or a glycol ether, and a rinsing step of contacting it with a fluorinated ether, wherein the fluorinated ether is a compound represented by the formula 1: R1—O—R2   Formula 1 wherein each of R1 and R2 which are independent of each other, is a fluorinated alkyl group, wherein the number of fluorine atoms contained in each of R1 and R2 is at least one, and the total number of carbon atoms contained in R1 and R2 is from 4 to 8.

Dependencies are inferred from the claim text.