Process for manufacturing liquid ejection head
AssigneeSony Corporation
InventorShogo Ono
Life of this patent
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Abstract
A process includes forming a protective layer in a region of a substrate including a PAD electrode; forming a soluble resin layer in a region including a region on the substrate where an energy generating element has been formed, for forming a liquid chamber; forming a coating resin layer in a region covering the soluble resin layer and a region where an opening is formed above the electrode; forming an opening in the coating resin layer above the energy generating element to form a nozzle; dipping the substrate in an dissolving liquid to dissolve the soluble resin layer; and removing the protective layer after dissolution of the soluble resin layer.
Claims4
A process for manufacturing a liquid ejection head including an energy generating element formed on a substrate, for applying energy to a liquid;
- a liquid chamber containing the energy generating element and the liquid to be ejected;
- a nozzle for ejecting the liquid contained in the liquid chamber;
- and an electrode formed on the substrate, for achieving electrical connection to the outside, the process comprising the steps of:
- forming a protective layer in a region of the substrate including the electrode;
- forming a soluble resin layer in a region including a region of the substrate where the energy generating element has been formed, for forming the liquid chamber;
- forming a coating resin layer in a region covering the soluble resin layer and a region where an opening is formed above the electrode;
- forming an opening in the coating resin layer above the energy generating element to form the nozzle;
- dipping the substrate in a dissolving liquid to dissolve the soluble resin layer;
- and
- removing the protective layer after dissolution of the soluble resin layer.
Dependencies are inferred from the claim text.