Back to results
US 2006/0134883 A1Published application
Systems and methods for electrical contacts to arrays of vertically aligned nanorods
AssigneePalo Alto Research Center Incorporated
InventorsThomas Hantschel, Noble Johnson, Peter Kiesel, Christian Van De Walle, William Wong
Life of this patent
Estimating the term…
Abstract
Systems and methods may provide electrical contacts to an array of substantially vertically aligned nanorods. The nanorod array may be fabricated on top of a conducting layer that serves as a bottom contact to the nanorods. A top metal contact may be applied to a plurality of nanorods of the nanorod array. The contacts may allow I/V (current/voltage) characteristics of the nanorods to be measured.
Claims22
A method of fabricating a nanorod device, comprising:
- forming an array of nanorods on a surface of a substrate, each nanorod in the array extending in a direction non-parallel with the surface of the substrate;
- depositing a first sacrificial layer to encapsulate at least part of the array;
- removing a top thickness of the first sacrificial layer to expose tops of a plurality of nanorods;
- and
- forming a first contact layer on the first sacrificial layer, the first contact layer being in electrical contact with the tops of the plurality of nanorods.
2 more elements
Dependencies are inferred from the claim text.