Manufacturing method of a microelectromechanical switch
AssigneeSTMicroelectronics S.r.I., State of Incorporation: Italy
InventorsChantal Combi, Benedetto Vigna
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Abstract
The method for manufacturing a micromechanical switch includes manufacturing a hanging bar, on a first semiconductor substrate, equipped at an end thereof with a contact electrode, and a frame projecting from the first semiconductor substrate. A second semiconductor substrate with conductive tracks includes a second input/output electrode and a third starting electrode, and first and second spacers electrically connected to the conductive tracks. The frame is abutted with the first spacers so that the fourth contact electrode abuts on the second input/output electrode in response to an electrical signal provided to the hanging bar by the third starting electrode.
Claims24
1-21. (canceled)
A micromechanical switch comprising:
- a first semiconductor substrate having a frame projecting therefrom;
- a hanging bar within the frame on the first substrate and having a first contact electrode at an end thereof;
- an insulating layer between the hanging bar and the first semiconductor substrate;
- a second semiconductor substrate having conductive tracks therein;
- first peripheral spacers on said second substrate cooperating with the frame to define a chamber housing the hanging bar;
- a second input/output electrode on said second substrate and in alignment with the first contact electrode;
- and
- a third starting electrode on said second substrate and in alignment with said hanging bar;
- the first peripheral spacers, the second input/output electrode and the third starting electrode being electrically connected to the conductive tracks.
A micromechanical switch comprising:
- a first substrate;
- a frame projecting from the first substrate;
- a cantilever member within the frame on the first substrate and having a first contact electrode at an end thereof;
- a second substrate comprising conductive tracks;
- first peripheral spacers on said second substrate cooperating with the frame to define a chamber housing the cantilever member;
- and
- a second input/output electrode on said second substrate and in alignment with the first contact electrode;
- the first peripheral spacers and the second input/output electrode being electrically connected to the conductive tracks.
A micromechanical switch comprising:
- a first substrate;
- a conductive frame projecting from the first substrate;
- a first insulating layer on said conductive frame;
- a conductive cantilever member within the conductive frame on the first substrate and having a first contact electrode at an end thereof;
- a second insulating layer on said conductive cantilever member;
- a second substrate comprising conductive tracks;
- first peripheral spacers on said second substrate cooperating with the conductive frame to define a chamber housing the conductive cantilever member;
- and
- a second input/output electrode on said second substrate and in alignment with the first contact electrode;
- the first peripheral spacers and the second input/output electrode being electrically connected to the conductive tracks.
Dependencies are inferred from the claim text.