Fabrication of a ferromagnetic inductor core and capacitor electrode in a single photo mask step
AssigneeTexas Instruments Incorporated
InventorsKenneth Brennan, Satyavolu Papa Rao
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Abstract
An integrated circuit capacitor having a bottom plate 50a, a dielectric layer 250′, and a ferromagnetic top plate 20a. Also, a method of manufacturing an integrated circuit on a semiconductor wafer. The method comprising forming a bottom plate of a capacitor 50a and a bottom portion of an induction coil 50a, forming an etch stop layer 250′, forming a ferromagnetic capacitor top plate 20a and a ferromagnetic core 20b, forming a top portion of the induction coil 50b plus vias 50c that couple the top portion of the induction coil 50b to the bottom portion of the induction coil 50c.
Claims4
1-22. (canceled)
An integrated circuit capacitor comprising:
- a bottom plate;
- a dielectric coupled to said bottom plate;
- and
- a top plate coupled to said dielectric, said top plate having ferromagnetic material.
Dependencies are inferred from the claim text.