Electroplated three dimensional ink jet manifold and nozzle structures using successive lithography and electroplated sacrificial layers

A fabrication process for fabricating three dimensional structures on an ink jet print die, the three dimensional structure covering pre-existing MEMS structure of the print head die and forming at least one substantially enclosed fluid receiving cavity having a height of about 40 μm or more and at least one fluid ejecting aperture having a diameter of less than 50 μm, comprising:

• applying and patterning a first photoresist mask on an ink jet printhead die having pre-existing MEMS structure thereon;
• electrodepositing a sacrificial layer of material into the patterned photoresist mask to define boundaries of a first three dimensional structural element component, the sacrificial layer being formed above the pre-existing MEMS structure;
• applying and patterning a second photoresist mask on top of pre-existing layers to define additional boundaries of a three dimensional structural element component;
• electrodepositing at least one structural layer of material into the patterned photoresist mask to define side walls of the first three dimensional structural element component adjacent the sacrificial layer and a lid structure substantially covering a top surface of the sacrificial layer, the combination of side walls and lid structure forming a manifold that substantially encompasses and surrounds the sacrificial layer, the lid structure including at least one aperture having a diameter of less than 50 μm exposing the sacrificial layer to an exterior of the three dimensional structural element component;
• and
• applying a selective etchant through the at least one lid structure aperture to remove the sacrificial material and define a hollow cavity bounded by the three dimensional structural element component that serves as a fluid channel, the fluid channel being in communication with the MEMS structure.

A fabrication process for fabricating three dimensional structures on an ink jet print die, the three dimensional structure covering pre-existing MEMS structure of the print head die and forming at least one substantially enclosed fluid receiving cavity having an internal height of about 40 μm or more and at least one fluid ejecting aperture having a diameter of less than 50 μm, comprising:

• applying and patterning a first photoresist mask on an ink jet printhead die having pre-existing MEMS structure thereon;
• electrodepositing a sacrificial layer of material into the patterned photoresist mask to define boundaries of a first three dimensional structural element component, the sacrificial layer being formed above the pre-existing MEMS structure;
• applying and patterning a second photoresist mask on top of pre-existing layers to define additional boundaries of a three dimensional structural element component;
• electrodepositing at least one structural layer of material into the patterned photoresist mask to define side walls of the first three dimensional structural element component adjacent the sacrificial layer and a lid structure substantially covering a top surface of the sacrificial layer, the combination of side walls and lid structure forming a manifold that substantially encompasses and surrounds the sacrificial layer, the lid structure including at least one aperture forming a fluid ejecting nozzle having a diameter of less than 50 μm exposing the sacrificial layer to an exterior of the three dimensional structural element component;
• and
• applying a selective etchant through the at least one lid structure aperture to remove the sacrificial material and define a hollow cavity bounded by the three dimensional structural element component that serves as a fluid channel, the fluid channel being in communication with the MEMS structure.