Monolithic inkjet printhead and method of manufacturing the same

A method of manufacturing an inkjet printhead, the method comprising:

• forming a first photoresist layer on a substrate having one or more pressure generating elements disposed thereon and defining a first portion of the first photoresist layer to include an ink flow path and one or more ink chambers and a first remaining portion;
• forming a second photoresist layer on the first photoresist layer and defining a second portion of the second photoresist layer to include one or more nozzles to correspond to the one or more ink chambers and a second remaining portion;
• and
• removing the first and second portions of the first and second photoresist layers to form the ink flow path, the one or more ink chambers, and the one or more nozzles.

A method of manufacturing an inkjet printhead, the method comprising:

• forming a first layer of an ink flow structure on a substrate;
• performing a first photolithographic operation on the first layer;
• forming a second layer of the ink flow structure on the first layer;
• performing a second photolithographic operation on the second layer;
• removing a portion of the second layer;
• and
• removing a portion of the first layer.

An inkjet printhead, comprising:

• one or more pressure generating elements disposed on a surface of a semi-processed substrate;
• a first photoresist layer disposed on the semi-processed substrate and comprising a first portion to correspond to an ink flow path and one or more ink chambers that correspond to the one or more pressure generating elements and a first remaining portion to correspond to a chamber wall to define the ink flow path and the one or more ink chambers;
• and
• a second photoresist layer disposed on the first portion and the first remaining portion of the first photoresist layer and comprising a second portion to correspond to one or more nozzles to correspond to the one or more ink chambers and a second remaining portion to define the one or more nozzles,
• wherein the second portion and the first portion are removable in order.