A method for producing a negative electrode for a lithium ion secondary battery comprising a step of continuously evaporating a silicon target and a silicon oxide target by sputtering or vapor deposition to supply silicon atoms to a current collector and supply silicon atoms and oxygen atoms to said current collector, respectively, while alternately blocking the supply of the silicon atoms and the supply of the silicon atoms and the oxygen atoms to said current collector at certain time intervals, so that the supply of the silicon atoms to said current collector and the supply of the silicon atoms and the oxygen atoms to said current collector are alternated to form a first layer containing only silicon or silicon and a small amount of oxygen and a second layer containing silicon and a larger amount of oxygen than the first layer, respectively, said first and second layers being alternately laminated on the current collector.