Siloxane-based polymer and method for forming dielectric film using the polymer
AssigneeSamsung Corning Co., Ltd.
InventorsSang Mah, Hyeon Shin, Hyun Jeong
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Abstract
A siloxane-based polymer having superior mechanical properties and low dielectric properties and a method for forming a dielectric film using the polymer. The siloxane-based polymer not only has superior mechanical properties, but also exhibits low hygroscopicity and good compatibility with pore-forming materials, which leads to a low dielectric constant. In addition, since the siloxane-based polymer is highly compatible with pore-forming materials and has improved applicability to semiconductor processes, it may be advantageously used as a material for dielectric films of semiconductor devices.
Claims15
A siloxane-based polymer prepared by the hydrolysis and polycondensation of a monomer represented by Formula 1 below:
- wherein R1 and R2 are each independently a hydrogen atom, hydroxy, alkoxy, acetoxy, alkyl, aryl, or O—Si(OR)3 (in which R is a C1-C3 alkyl group);
- and n is an integer of 2 to 100 (with the proviso that at least one of R1 and R2 is a reactive functional group selected from a hydrogen atom, hydroxy, alkoxy, acetoxy, or O—Si(OR)3),
- with at least one monomer selected from compounds represented by Formulae 2 to 5 below:
- (R1)nSi(OR2)4-n (2)
- wherein R1 is a hydrogen atom, a C1-C3 alkyl group, a halogen atom, or a C6-C15 aryl group;
- R2 is a hydrogen atom, a C1-C3 alkyl group or a C6-C15 aryl group, with the proviso that at least one of R1 and OR2 is a hydrolysable functional group;
- and n is an integer of 0 to 3,
- wherein R1 is a hydrogen atom, a C1-C3 alkyl group or a C6-C15 aryl group;
- R2 is a hydrogen atom, a C1-C10 alkyl group or SiX1X2X3 (in which X1, X2 and X3 are each independently a hydrogen atom, a C1-C3 alkyl group, a C1-C10 alkoxy group, or a halogen atom, with the proviso that at least one of X1, X2 and X3 is a hydrolysable functional group);
- and p is an integer of 3 to 8,
- wherein R1 is a hydrogen atom, a C1-C3 alkyl group or a C6-C15 aryl group;
- X1, X2 and X3 are each independently a hydrogen atom, a C1-C3 alkyl group, a C1-C10 alkoxy group or a halogen atom, with the proviso that at least one of X1, X2 and X3 is a hydrolysable functional group;
- m is an integer of 0 to 10;
- and p is an integer of 3 to 8,
- X3X2X1Si—M—SiX1X2X3 (5)
- wherein X1, X2 and X3 are each independently a hydrogen atom, a C1-C3 alkyl group, a C1-C10 alkoxy group or a halogen atom, with the proviso that at least one of X1, X2 and X3 is a hydrolysable functional group;
- M is a C1-C10 alkylene group or a C6-C15 arylene group, hydrolysates thereof, and condensates thereof,
- in an organic solvent in the presence of water and an acid or base catalyst.
Dependencies are inferred from the claim text.