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US 2006/0134329 A1Published application
Method of forming a porous metal catalyst on a substrate for nanotube growth
AssigneeMotorola, Inc.
InventorsYi Wei, Jeffrey Baker, Bernard Coll, Steven Smith
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Abstract
A method is provided for forming a porous metal catalyst (44) on a substrate (42) for nanotube (84) growth in an emissive display. The method comprises depositing a metal (44) onto a surface of a substrate (12) at an angle (Θ) to the surface, depositing a metal catalyst (72) onto the metal (44), and forming nanotubes (84) on the metal catalyst (72).
Claims24
A method comprising:
- providing a substrate having a surface;
- depositing a metal onto the substrate at an angle to the surface;
- depositing a metal catalyst onto the metal;
- and
- forming nanotubes on the metal catalyst.
2 more elements
A method comprising:
- providing a substrate having a surface;
- depositing a metal onto the substrate at an angle of between 10 to 30 degrees to the surface;
- depositing a metal catalyst onto the metal;
- and
- performing a growth using hydrogen and carbon containing gases to convert at least some of the metal catalyst into particles while simultaneously growing carbon nanotubes on the particles.
2 more elements
A method for forming an emissive display, comprising:
- providing a substrate having a surface;
- depositing a metal onto the surface from a source so the metal strikes the surface at an angle;
- depositing a catalyst onto the metal;
- and
- depositing carbon containing gases and hydrogen onto the catalyst so particles are formed from the catalyst and carbon nanotubes are grown from the particles.
2 more elements
Dependencies are inferred from the claim text.