Plasma reaction vessel, and method of producing the same

A method of manufacturing a plasma reactor which includes a plasma generating electrode capable of generating plasma upon application of a voltage and can cause a gas to react by the plasma generated, the method comprising:

• forming tape-shaped first and second unfired ceramic formed bodies by tape-forming;
• printing a conductor electrode on one surface of the resulting first unfired ceramic formed body to form an unfired ceramic formed body having an electrode;
• layering the resulting unfired ceramic formed body having an electrode and the second unfired ceramic formed body so as to cover the conductor electrode of the unfired ceramic formed body having an electrode to form an unfired multilayer structure;
• and then either firing the resulting unfired multilayer structure to form a multilayer structure and layering two or more of the resulting multilayer structures to form the plasma generating electrode;
• or winding or folding two or more (even number) of the resulting unfired multilayer structures to form a wound unfired multilayer structure and firing the wound unfired multilayer structure to form the plasma generating electrode.

A method of manufacturing a plasma reactor which includes a plasma generating electrode capable of generating plasma upon application of a voltage and can cause a gas to react by the plasma generated, the method comprising:

• forming tape-shaped first and second unfired ceramic formed bodies by tape-forming;
• printing a first conductor electrode on one surface of the resulting first unfired ceramic formed body to form an unfired ceramic formed body having an electrode;
• layering the resulting unfired ceramic formed body having an electrode and the second unfired ceramic formed body so as to cover the conductor electrode of the unfired ceramic formed body having an electrode to form an unfired multilayer structure;
• forming recesses and protrusions at each surface of the resulting unfired multilayer structure to form an unfired multilayer structure having recesses and protrusions;
• disposing a plate-shaped second conductor electrode on one surface of the resulting unfired multilayer structure having recesses and protrusions to form an unfired multilayer structure having an electrode;
• firing the unfired multilayer structure having an electrode to form a multilayer structure having an electrode;
• and then either layering two or more of the resulting multilayer structures having an electrode to form the plasma generating electrode, or winding or folding at least one of the resulting unfired multilayer structures to form a wound unfired multilayer structure and firing the wound unfired multilayer structure to form the plasma generating electrode.

A method of manufacturing a plasma reactor which includes a plasma generating electrode capable of generating plasma upon application of a voltage and can cause a gas to react by the plasma generated, the method comprising:

• forming tape-shaped first and second unfired ceramic formed bodies by tape-forming;
• printing a first conductor electrode on one surface of the resulting first unfired ceramic formed body to form an unfired ceramic formed body having an electrode;
• layering the resulting unfired ceramic formed body having an electrode and the second unfired ceramic formed body so as to cover the conductor electrode of the unfired ceramic formed body having an electrode to form an unfired multilayer structure;
• forming recesses and protrusions at one surface of the resulting unfired multilayer structure to form an unfired multilayer structure having recesses and protrusions;
• printing a second conductor electrode on the other surface of the resulting unfired multilayer structure having recesses and protrusions to form an unfired multilayer structure having an electrode;
• firing the resulting unfired multilayer structure having an electrode to form a multilayer structure;
• and layering two or more of the resulting multilayer structures to form the plasma generating electrode.