Optical dry-films and methods of forming optical devices with dry films
AssigneeRohm and Haas Electronic Materials LLC
InventorsJames Shelnut, Matthew Moynihan, Luke Little
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Abstract
Provided is a dry-film suitable for use in forming an optical component. The dry-film includes a carrier substrate having a front surface and a back surface. A non-photoimageable, thermally curable polymeric layer is provided over the front surface of the carrier substrate. The polymeric layer includes a thermally active component and units of the formula (RSiO1.5), wherein R is a substituted or unsubstituted organic group. A protective cover layer is disposed over the front or back surface of the carrier substrate. Also provided are methods of forming optical devices with dry-films. The invention finds particular applicability in the optoelectronics industry.
Claims11
A dry-film suitable for use in forming an optical component, comprising:
- a carrier substrate having a front surface and a back surface;
- a non-photoimageable, thermally curable polymeric layer over the front surface of the carrier substrate, comprising a thermally active component and units of the formula (RSiO1.5), wherein R is a substituted or unsubstituted organic group;
- and
- a protective cover layer over the front or back surface of the carrier substrate.
A method of forming an optical device, comprising:
- (a) applying over a first substrate a dry-film comprising a carrier substrate and a non-photoimageable, thermally curable polymeric layer, the polymeric layer comprising a thermally active component and units of the formula (RSiO1.5), wherein R is a substituted or unsubstituted organic group;
- and
- (b) after (a), heat-curing at least a portion of the polymeric layer.
Dependencies are inferred from the claim text.