Structure and method for reducing thermal stresses on a torsional hinged device
AssigneeTexas Instruments Incorporated
InventorsArthur Turner, John Orcutt, Carter Simpson
Life of this patent
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Abstract
Method and structure for mounting a torsional hinged device, such as a mirror, having a first TCE (thermal coefficient of expansion) on a substrate having a second TCE different than said first TCE. The structure comprising a plurality of compliant support posts between the substrate and the torsional hinged device that deform when the contraction and/or expansion of the torsional hinged device is different than the corresponding contraction and expansion of the substrate.
Claims20
A method of mounting a torsional hinged structure for use over a selected temperature range to a substrate having a different TCE (temperature coefficient of expansion) comprising the steps of:
- providing a substrate having a first TCE;
- providing a plurality of compliant support posts, each of said support posts including a bottom mounting surface, and a top mounting surface;
- bonding said bottom mounting surface of said plurality of support posts to said substrate;
- bonding a torsional hinged structure having a second TCE to said top mounting surfaces of said plurality of compliant support posts, said second TCE being different than said first TCE;
- and
- said plurality of compliant support posts deforming when the expansions and/or contractions of said torsional hinged structure are different than the corresponding expansions and/or contractions of the substrate.
A torsional hinged structure for operating a selected temperature range comprising:
- a substrate having a first TCE;
- a plurality of compliant support posts having a bottom mounting surface and a top mounting surface, the bottom mounting surface of each of said compliant support posts bonded to said substrate;
- and
- a torsional hinged device having a second TCE different than said first TCE and bonded to said top mounting surface of each of said plurality of compliant support posts.
Dependencies are inferred from the claim text.