MEMS switch and method of fabricating the same

A method of fabricating a micro electro mechanical system switch, comprising:

• depositing a metal layer on a substrate and patterning signal lines comprising switching contact points and immovable electrodes;
• depositing a sacrificial layer on the signal lines and the immovable electrodes;
• depositing a second sacrificial on the first sacrificial layer and forming contacting member holes in positions facing the switching contact points;
• depositing a contacting member layer on the second sacrificial layer and leaving portions of the contacting member layer buried in the contacting member holes to pattern contacting members;
• depositing an actuating member layer on an upper surface of the contacting member layer on which the contacting members are formed and patterning inner and outer actuating members;
• depositing a third sacrificial layer on the second sacrificial layer on which the inner and outer actuating members are formed and patterning gap forming parts forming gaps of pushing rods;
• depositing a fourth sacrificial layer on the third sacrificial layer and patterning pushing rod support holes;
• depositing a pushing rod layer on the fourth sacrificial layer and patterning the pushing rods;
• and
• removing the first, second, third, and fourth sacrificial layers.