Bias voltage routing scheme for a digital micro-mirror device
AssigneeTexas Instruments Incorporated
InventorBrett Mangrum
Life of this patent
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Abstract
An apparatus for use with a digital micro-mirror includes a hinge disposed outwardly from a substrate and capable of at least partially supporting a micro-mirror disposed outwardly from the hinge. The micro-mirror capable of being selectively transitioned between an on-state position and an off-state position based at least in part on a bias voltage received by a conductive conduit. The apparatus also includes a conductive layer disposed inwardly from the at least one micro-mirror. In one particular embodiment, the conductive layer enables a conductive path for the bias voltage substantially inwardly from a periphery of the micro-mirror.
Claims20
An apparatus for use with a digital micro-mirror, comprising:
- a hinge disposed outwardly from a substrate and capable of at least partially supporting a micro-mirror disposed outwardly from the hinge, the micro-mirror capable of being selectively transitioned between an on-state position and an off-state position based at least in part on a bias voltage received by a conductive layer;
- a hinge void disposed inwardly from the hinge;
- and
- a plurality of interconnected conductive conduits formed within the conductive layer and disposed inwardly from the micro-mirror, wherein the plurality of interconnected conductive conduits enable a conductive path for the bias voltage substantially inwardly from a periphery of the micro-mirror.
A method of forming an apparatus for use with a digital micro-mirror, comprising:
- forming a hinge disposed outwardly from a substrate, the hinge capable of at least partially supporting a micro-mirror disposed outwardly from the hinge;
- and
- forming a hinge void within a conductive layer, the hinge void disposed inwardly from the hinge, wherein the hinge void is substantially free from conductive materials;
- and
- routing a bias voltage substantially inwardly from a periphery of the micro-mirror.
An apparatus for use with a digital micro-mirror, comprising:
- a hinge disposed outwardly from a substrate and capable of at least partially supporting a micro-mirror disposed outwardly from the hinge, the micro-mirror capable of being selectively transitioned between an on-state position and an off-state position based at least in part on a bias voltage received by a conductive conduit;
- and
- a conductive layer disposed inwardly from the at least one micro-mirror, wherein the conductive layer enables a conductive path for the bias voltage substantially inwardly from a periphery of the micro-mirror.
Dependencies are inferred from the claim text.