Laser triangulation method for measurement of highly reflective solder balls
AssigneeRVSI Inspection LLC
InventorWilliam Yonescu
Life of this patent
Estimating the term…
Abstract
A system and method of determining a height and/or position of at least one element on an area array device. A laser beam scans the area array device using at least two different laser light intensities. Reflected light is sampled, and the height and/or position of the element is determined using, e.g., optical triangulation.
Claims44
A method of determining a height and/or position of at least one element on an area array device, comprising:
- directing a laser beam having a first laser beam intensity at the surface of the at least one element;
- sampling light reflected from the at least one element, the reflected light resulting from the laser beam having the first laser beam intensity;
- directing a laser beam having a second laser intensity at the at least one element, the second laser intensity being different than the first laser intensity;
- sampling light reflected from the at least one element, the reflected light resulting from the laser beam having the second laser intensity;
- and
- determining at least one of a position and a height of the at least one element as a function of the sampled reflected light resulting from the laser beam having the first laser beam intensity and the sampled reflected light resulting from the laser beam having the second laser beam intensity.
A method of determining a position of at least one element on an area array device, comprising:
- directing a laser beam having a first laser beam intensity at a point on the least one element for a first period;
- sampling light reflected from the at least one element to provide a first sample value, the reflected light resulting from the laser beam having the first laser beam intensity;
- varying the laser beam from the first laser beam intensity to a second laser beam intensity while directing the laser beam at the least one element at the point, the laser beam directed at the at least one element for a second period;
- sampling light reflected from the at least one element to provide a second sample value, the reflected light resulting from the laser beam having the second laser beam intensity;
- and
- determining at least one of a position and a height of the at least one element as a function of the first sample value and the second sample value.
A method of determining positions and/or heights of elements on an area array device, comprising:
- scanning a surface of an area array device with a laser beam;
- varying a laser intensity of the laser beam while the laser beam is scanning the surface of the area array device, the laser intensity being alternatingly varied between at least two laser intensity levels;
- sampling light reflected from area array device to provide sample values;
- and
- determining at least one of a height and a position of at least some of the elements on the area array device as a function of the sample values.
A system for determining a height and/or position of at least one element on an area array device, comprising:
- a laser configured to generate a laser beam at a first laser beam intensity and a second laser beam intensity;
- a receiving arrangement configured to sample laser light and to receive reflected laser beam light at at least two intensities;
- and
- a controlling device coupled to the laser, the controlling device configured to control laser beam intensity and direct the laser beam at the first laser beam intensity and the second laser beam intensity;
- and
- an arrangement configured to determine at least one of a position and a height of the element as a function of the sampled reflected light resulting from the laser beam having the first laser beam intensity and the second laser beam intensity.
The system according to clam 30, wherein the controlling device is configured to further control at least one of laser position, receiving arrangement position and surface position.
A computer program, comprising:
- a program code arrangement executable on a computer to perform the following:
- directing a laser beam having a first laser beam having a first laser beam intensity at the surface of the at least one element
- sampling light reflected from at least one element, the reflected light resulting from the laser beam having the first laser beam intensity;
- directing a laser beam having a second laser intensity at the at least one element, the second laser intensity being different than the first laser intensity;
- sampling light reflected from the at least one element, the reflected light resulting from the laser beam having the second laser intensity;
- and
- determining at least one of the position and the height of the at least one element as a function of the sampled reflected light resulting from the laser beam having the first laser intensity and the sampled reflected light resulting from the laser beam having the second laser beam intensity.
A computer program, comprising:
- a program code arrangement executable on a computer to perform the following:
- directing a laser beam having a first laser beam intensity at a point on the least one element for a first period;
- sampling light reflected from the at least one element to provide a first sample value, the reflected light resulting from the laser beam having the first laser beam intensity;
- varying the laser beam from the first laser beam intensity to a second laser beam intensity while directing the laser beam at the point, the laser beam directed at the at least one element for a second period;
- sampling light reflected from the at least one element to provide a second sample value, the reflected light resulting from the laser beam having the second laser beam intensity;
- and
- determining at least one of a position and a height of the at least one element as a function of the first sample value and the second sample value.
A computer program, comprising:
- a program code arrangement executable on a computer to perform the following:
- scanning a surface of an area array device with a laser beam;
- varying a laser intensity of the laser beam while the laser beam is scanning the surface of the area array device, the laser intensity being alternatingly varied between at least two laser intensity levels;
- sampling light reflected from area array device to provide sample values;
- and
- determining at least one of a height and a position of at least some of the elements on the area array device as a function of the sample values.
Dependencies are inferred from the claim text.