Method and apparatus for automatic correction of direct exposure apparatus
AssigneeShinko Electric Industries Co., Ltd.
InventorKenji Ikedo
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AssigneeShinko Electric Industries Co., Ltd.
InventorKenji Ikedo
Estimating the term…
An automatic correction method for a direct exposure apparatus comprises the steps of: illuminating two exposure elements, which are included in adjacent exposure heads separately and which are to expose an identical line on an exposure target, among exposure elements arranged in a two-dimensional manner with an inclination of relative movement of an exposure target in a plurality of exposure heads arranged in the direction of the relative movement of the exposure target; detecting the illumination of the two exposure elements by using a sensor board 11 that is moved, on the side where the exposure heads are illuminated, in the direction in which the exposure heads are arranged; and calculating correction amounts for correcting so that the two exposure elements can expose the identical line mentioned above, based on a detection result of the illumination of the exposure elements by the sensor board 11.
An automatic correction method for a direct exposure apparatus in which a plurality of exposure heads having exposure elements arranged in a two-dimensional manner with an inclination with respect to relative movement of an exposure target are arranged in a direction orthogonal to the direction of said relative movement, comprising:
An automatic correction apparatus for a direct exposure apparatus comprising a plurality of exposure heads having exposure elements arranged in a two-dimensional manner with an inclination with respect to relative movement of an exposure target are arranged in a direction orthogonal to the direction of said relative movement, comprising:
Dependencies are inferred from the claim text.