Semiconductor device and manufacturing method thereof
AssigneeKabushiki Kaisha Toshiba
InventorHisanori Ihara
Life of this patent
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Abstract
A solid-state imaging device achieving a global shutter of images and its manufacturing method are disclosed. According to one aspect of the present invention, it is provided a solid-state imaging device comprising an optical signal storage region provided in a semiconductor substrate, a signal detecting region provided in the semiconductor substrate apart from the optical signal storage region, a transistor electrically connecting the optical signal storage region with the signal detecting region, a wiring connected with the signal detecting region, and a light shielding film provided in close proximity to the signal detecting region and over the signal detecting region.
Claims20
A solid-state imaging device comprising:
- an optical signal storage region provided in a semiconductor substrate;
- a signal detecting region provided in the semiconductor substrate apart from the optical signal storage region;
- a transistor electrically connecting the optical signal storage region with the signal detecting region;
- a wiring connected with the signal detecting region;
- and
- a light shielding film provided in close proximity to the signal detecting region and over the signal detecting region.
A manufacturing method of a solid-state imaging device, comprising:
- forming an optical signal storage region in a semiconductor substrate;
- forming a signal detecting region in the semiconductor substrate apart from the optical signal storage region;
- forming a source/drain of a transistor in the semiconductor substrate;
- forming a conductive material film on the semiconductor substrate through an insulator;
- patterning the conductive material film to form a gate electrode of a transistor, the transistor electrically connects the optical signal storage region with the signal detecting region;
- forming a light shielding film over the signal detecting region;
- and
- forming a wiring connected with the signal detecting region.
Dependencies are inferred from the claim text.