Method for producing actuator device, and liquid-jet apparatus
AssigneeSeiko Epson Corporation
InventorMaki Ito
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Abstract
A method for producing an actuator device, comprising the steps of: forming a vibration plate on one surface of a substrate; and forming piezoelectric elements, each of which composes a lower electrode, a piezoelectric layer, and an upper electrode, on the vibration plate, and wherein the step of forming the vibration plate has an insulation film formation step including at least a film forming step of forming a zirconium layer on the one surface of the substrate, and a thermal oxidation step of thermally oxidizing the zirconium layer at a predetermined thermal oxidation temperature to form an insulation film comprising a zirconium oxide layer and, simultaneously, adjusting a stress of the insulation film.
Claims7
A method for producing an actuator device, comprising the steps of:
- forming a vibration plate on one surface of a substrate;
- and
- forming piezoelectric elements, each of which composes a lower electrode, a piezoelectric layer, and an upper electrode, on the vibration plate, and
- wherein the step of forming the vibration plate has an insulation film formation step including at least a film forming step of forming a zirconium layer on the one surface of the substrate, and a thermal oxidation step of thermally oxidizing the zirconium layer at a predetermined thermal oxidation temperature to form an insulation film comprising a zirconium oxide layer and, simultaneously, adjusting a stress of the insulation film.
Dependencies are inferred from the claim text.