Acoustic resonator performance enhancement using selective metal etch
AssigneeAvago Technologies Wireless IP (Singapore) Pte. Ltd.
InventorsRonald Fazzio, Hongjun Feng
Life of this patent
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Abstract
An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, and a second electrode. The substrate has a first surface and the first electrode is adjacent the first surface of the substrate. The layer of piezoelectric material is adjacent the first electrode. The second electrode is adjacent the layer of piezoelectric material, and the second electrode lies in a first plane and has an edge. The layer of piezoelectric material has a recessed feature adjacent the edge of the second electrode.
Claims23
An acoustic resonator comprising:
- a substrate;
- a first electrode adjacent the substrate;
- a piezoelectric layer adjacent the first electrode, wherein the piezoelectric layer includes a recessed feature;
- and
- a second electrode adjacent the piezoelectric layer, the second electrode having an edge.
An acoustic resonator comprising:
- a substrate having a first surface;
- a first electrode adjacent the first surface of the substrate;
- a layer of piezoelectric material adjacent the first electrode;
- a second electrode adjacent the layer of piezoelectric material, the second electrode lying in a first plane and having an edge;
- and
- a passivation layer adjacent the second electrode, the passivation layer lying in a second plane that is generally parallel to the first plane and having an edge;
- wherein the layer of piezoelectric material has a recessed feature adjacent the edge of the second electrode.
An acoustic resonator comprising:
- a substrate;
- a first electrode adjacent the substrate;
- a layer of piezoelectric material adjacent the first electrode;
- a second electrode adjacent the layer of piezoelectric material;
- a passivation layer adjacent the layer of piezoelectric material, wherein the passivation layer includes a recessed feature;
- and
- fill material in the recessed feature of the passivation layer.
Dependencies are inferred from the claim text.