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US 2006/0132165 A1Published application
Method and system for testing semiconductor devices
AssigneeTeradyne, Inc.
InventorsErnest Walker, Ronald Sartschev
Life of this patent
Estimating the term…
Abstract
A semiconductor device tester includes a parametric measurement unit (PMU) stage for producing a DC test signal and a pin electronics (PE) stage for producing an AC test signal to test a semiconductor device. A driver circuit is capable of providing a version of the DC test signal and a version of the AC test signal to the semiconductor device.
Claims27
A semiconductor device tester, comprising:
- a PMU stage configured to produce a DC test signal for testing a semiconductor device;
- a PE stage configured to produce an AC test signal for testing the semiconductor device;
- and
- a driver circuit configured to provide, in a first mode, a version of the DC test signal to the semiconductor device and, in a second mode, configured to provide a version of the AC test signal to the semiconductor device.
1 more element
A semiconductor device tester, comprising:
- a PMU stage configured to produce a DC test signal for testing a semiconductor device;
- a PE stage configured to produce an AC test signal for testing the semiconductor device;
- and
- an output stage configured to provide the DC test signal and the AC test signal to the semiconductor device under test.
1 more element
A semiconductor device tester, comprising:
- an integrated circuit including;
- a PE stage configured to provide an AC test signal to a semiconductor device under test, and
- a PMU stage configured to provide a DC test signal to the semiconductor device under test.
A method of providing test signals to a semiconductor device, comprising:
- producing an DC test signal with a PMU stage;
- amplifying the DC test signal with a driver circuit that is configured to amplify an AC test signal from a PE stage;
- and
- sending the amplified DC test signal through an output stage to the semiconductor device under test, wherein the output stage is configured to provide an amplified AC test signal from the PE stage to the semiconductor device.
1 more element
A semiconductor device tester, comprising:
- an integrated circuit including;
- a PE stage configured to provide an AC test signal to a semiconductor device under test,
- a PMU stage configured to provide a DC test signal to the semiconductor device under test, and
- an output stage connected to the PE stage and the PMU stage, wherein the output stage is configured to provide the AC test signal and the DC test signal to the semiconductor device under test.
1 more element
Dependencies are inferred from the claim text.