Flexible mold, method of manufacturing same and method of manufacturing fine structures
OwnerTakaki Sugimotoinventor
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Abstract
A flexible mold (10) having a mold layer (11) that is provided on the surface thereof with a groove pattern (4) of specified shape and size, is constructed such that the mold layer contains a lithium salt of an organic fluorine compound as an antistatic agent.
Claims22
A flexible mold comprising a mold layer having on the surface thereof a groove-pattern of specified shape and size, wherein said mold layer comprises a lithium salt of an organic fluorine compound as an antistatic agent.
A flexible mold according to claim, wherein said lithium salt of an organic fluorine compound is not decomposed thermally at temperature below 200° C. during the course of molding process using said mold.
A method of manufacturing a flexible mold which has a mold layer provided on the surface thereof with a groove pattern having specified shape and size, said method comprising the steps of:
- forming a layer of a photocurable resin material by coating a photocurable resin material containing a lithium salt of an organic fluorine compound as an antistatic agent to a predetermined film thickness on a metal master pattern having on the surface thereof a protrusion pattern in shape and size corresponding to said groove pattern of said mold;
- laminating a transparent support consisting of a film of plastic material on said metal master pattern to thereby form a laminate of said metal master pattern, said layer of a photocurable resin material, and said support;
- irradiating said laminate with light from the side of the support to harden said layer of photocurable resin material;
- and
- releasing said mold layer formed by the hardening of said photocurable resin material together with said support from said metal master pattern.
A method of manufacturing a fine structure having a protrusion pattern of specified shape and size on the surface of a substrate, said method comprising the steps of:
- providing a flexible mold having a mold layer which has on the surface thereof a groove pattern of shape and size corresponding to said protrusion pattern, said mold layer containing a lithium salt of an organic fluorine compound as an antistatic agent;
- placing a curable molding material between said substrate and said mold layer of said mold, and filling said molding material into said groove pattern of the mold;
- hardening said molding material and forming a fine structure consisting of said substrate and the protrusion pattern integrally connected thereto in one unit;
- and
- removing said fine structure from the mold.
Dependencies are inferred from the claim text.