Micro column electron beam apparatus formed in low temperature co-fired ceramic substrate
AssigneeElectronics and Telecommunications Research Institute
InventorsDae Kim, Jin Jeong, Sang Choi, Dae Kim, Ho Kim
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Abstract
A micro column electron beam apparatus having a reduced number of interconnections is provided. The micro column electron beam apparatus includes: a low temperature co-fired ceramic (LTCC) substrate; a plurality of deflector electrodes attached to a predetermined top portion of the LTCC substrate; a pad electrode placed at a top edge of the LTCC substrate and transmitting an external signal to the deflector electrodes; and a connection unit placed in the LTCC substrate and electrically connecting the deflector electrode and the pad electrode.
Claims11
A micro column electron beam apparatus comprising:
- a low temperature co-fired ceramic (LTCC) substrate;
- a plurality of deflector electrodes attached to a predetermined top portion of the LTCC substrate;
- a pad electrode placed at a top edge of the LTCC substrate and transmitting an external signal to the deflector electrodes;
- and
- a connection unit placed in the LTCC substrate and electrically connecting the deflector electrode and the pad electrode.
Dependencies are inferred from the claim text.