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US 2006/0131700 A1Published application
Flexible electronic circuit articles and methods of making thereof
OwnerMoses David, Catharine Shay +3inventors
InventorsMoses David, Catharine Shay, Badri Veeraraghavan, Hideo Yamazaki, James Shirck
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Abstract
The present invention includes an electronic-circuit article that has a substrate, a plasma deposited layer disposed on the substrate, where the plasma deposited layer comprises at least about 10.0 atomic percent, and a patterned conductive layer disposed above the plasma deposited layer.
Claims24
An electronic-circuit article comprising:
- a substrate;
- a plasma deposited layer disposed on the substrate, wherein the plasma deposited layer comprises at least about 10.0 atomic percent silicon;
- and
- a patterned conductive layer disposed above the plasma deposited layer.
1 more element
An electronic-circuit article comprising:
- a polyimide substrate;
- a plasma deposited layer disposed on the polyimide substrate, wherein the plasma deposited layer is derived from a gas comprising at least about 50.0 atomic percent of an organosilicon compound;
- and a patterned conductive layer disposed above the plasma deposited layer.
A method of forming an electronic-circuit article, the method comprising:
- forming a silicon-containing layer on a substrate by plasma deposition;
- depositing a layer of conductive material above the silicon-containing layer;
- and
- patterning the layer of conductive material.
1 more element
Dependencies are inferred from the claim text.