Integrated circuits using optical waveguide interconnects formed through a semiconductor wafer and methods for forming same
AssigneeMicron Technology, Inc.
InventorsJoseph Geusic, Kie Ahn, Leonard Forbes
Life of this patent
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Abstract
An integrated circuit with a number of optical waveguides that are formed in high aspect ratio holes. The high aspect ratio holes extend through a semiconductor wafer. The optical waveguides include a highly reflective material that is deposited so as to line an inner surface of the high aspect ratio holes which may be filled with air or a material with an index of refraction that is greater than 1. These metal confined waveguides are used to transmit signals between functional circuits on the semiconductor wafer and functional circuits on the back of the wafer or beneath the wafer.
Claims41
An electronic system, comprising:
- a semiconductor substrate with a hole that includes an aspect ratio of at least approximately 100;
- an integrated circuit formed with the semiconductor substrate;
- an optical waveguide formed in the hole in the semiconductor substrate;
- and
- an optical transmitter and an optical receiver associated with the optical waveguide that transmits optical signals between selected integrated circuits of the electronic system.
An electronic system, comprising:
- a semiconductor substrate with a hole that includes a diameter in the range of approximately 0.5 microns to approximately 10 microns;
- an integrated circuit formed with the semiconductor substrate;
- an optical waveguide formed in the hole in the semiconductor substrate;
- and
- an optical transmitter and an optical receiver associated with the optical waveguide that transmits optical signals between selected integrated circuits of the electronic system.
An electronic system, comprising:
- a semiconductor substrate with a hole that includes an aspect ratio of at least approximately 100;
- an integrated circuit formed with the semiconductor substrate;
- and
- an optical waveguide formed in the hole in the semiconductor substrate, wherein an interior of the optical waveguide is filled with a material having an index of refraction greater than about 1.
An electronic system, comprising:
- a semiconductor substrate with a hole that includes an aspect ratio of at least approximately 100;
- an integrated circuit formed with the semiconductor substrate;
- an optical waveguide formed in the hole in the semiconductor substrate;
- and
- a gallium arsenide transmitter and an optical receiver associated with the optical waveguide that transmits optical signals between selected integrated circuits of the electronic system.
Dependencies are inferred from the claim text.