Media isolated electrostatically actuated valve

A valve structure comprising:

• a base;
• a perimeter layer situated on the base;
• a diaphragm situated on the perimeter layer;
• a chamber structure situated on a perimeter of the diaphragm;
• a first electrode attached to the chamber structure;
• a second electrode attached to the diaphragm;
• and
• a tube situated between the base and the diaphragm.

A fluid control device comprising:

• a first part having a base, a perimeter wall having a first port and a second port, and a support structure situated on the base;
• a tube at least partially situated on the support structure, and having a first end connected to the first port and a second end connected to the second port;
• a diaphragm situated on the perimeter wall and covering an area within the perimeter wall;
• a second part situated on the diaphragm in a vicinity of the perimeter wall and having a cavity in an area within the perimeter wall;
• a first electrode attached to the diaphragm;
• and
• a second electrode attached to an inside surface of the cavity.

An electrostatic actuated valve comprising:

• a bottom part having a ridge at a perimeter;
• a post situated on the bottom part;
• a squeezable tube situated on the post having a first end at the ridge for external access and a second end at the ridge for external access;
• a diaphragm over the bottom part having an edge at the ridge;
• a top part having a ridge that clamps the edge of the diaphragm;
• a first electrode attached to the diaphragm;
• and
• a second electrode attached to a bottom side of the top part.