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US 2006/0131501 A1Published application
Method for fabricating the same
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsKimiya Ikushima, Hiroyoshi Komobuchi, Asako Baba
Life of this patent
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Abstract
An electronic device according to the present invention includes: a cavity, which is surrounded with a cavity wall portion and which has a reduced pressure; a gettering thin film, which is arranged in the cavity and has the function of adsorbing a surrounding substance; and an activating portion, at least a part of which is arranged in the cavity and which has the function of activating the gettering thin film by generating heat.
Claims14
An electronic device comprising a substrate and a plurality of infrared sensing elements, which are arranged on the substrate,
- wherein each of the infrared sensing elements includes:
- a cavity wall portion, which is provided on the substrate to form a cavity with a reduced pressure;
- a gettering thin film, which is arranged in the cavity and has the function of adsorbing a surrounding substance;
- and
- an activating portion, at least a part of which is arranged in the cavity and which has the function of activating the gettering thin film by generating heat and the function of sensing a temperature inside the cavity, and
- wherein the electronic device further includes a control section for detecting degrees of vacuum in respective cavities based on the temperatures sensed and for activating the gettering thin film selectively in some or all of the cavities based on the degrees of vacuum detected.
3 more elements
Dependencies are inferred from the claim text.