Object-moving method, object-moving apparatus and production process using the method
AssigneeCanon Kabushiki Kaisha
InventorToshiaki Aiba
Life of this patent
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Abstract
A method of moving an object comprises a step of fixing the object to an object-moving means, a step of moving the object to a prescribed position by the object-moving means, and a step of releasing the object from the object-moving means; wherein the fixing step comprises forming a deposit, for fixation of the object to the object-moving means by applying a first corpuscular beam in a first gas to form a deposit; and the releasing step comprises etching the deposit by applying a second corpuscular beam in contact with a second gas.
Claims19
A method of moving an object comprising a step of fixing the object to an object-moving means, a step of moving the object to a prescribed position by the object-moving means, and a step of releasing the object from the object-moving means;
- wherein the step of fixing the object to the object-moving means comprises forming a deposit, for fixation of the object to the object-moving means kept close together, by applying a first corpuscular beam at a site for the fixation in a first gas to form a deposit from a substance constituting the first gas as a source material;
- and
- the step of releasing the object from the object-moving means comprises etching selectively the deposit by applying a second corpuscular beam to the position of the deposit in contact with a second gas capable of accelerating etching a main component of the deposit under application of the beam.
An object-moving apparatus, comprising a means for fixing a movement object to an object-moving means, an object-moving means, and a means for releasing the movement object from the object-moving means;
- wherein the means for fixing a movement object to an object-moving means comprises a means for holding the movement object and the object-moving means close together, and a means for forming a deposit a raw material of which is a principal component of a first gas by irradiating with a first corpuscular beam a site for the fixation in the first gas;
- and
- the means for releasing the movement object from the object-moving means comprises a means for irradiating with a second corpuscular beam a position of the deposit in a second gas.
Dependencies are inferred from the claim text.