Heat sink having a high thermal conductivity
AssigneePlansee SE
InventorArndt Ludtke
Life of this patent
Estimating the term…
Abstract
The invention relates to a heat sink comprising a diamond-containing composite material. In addition to a diamond content of 40-90% by volume, the composite material further comprises from 0.005 to 12% by volume of a silicon-carbon compound, from 7 to 49% by volume of an Ag-, Au- or Al-rich phase and less than 5% by volume of a further phase, with the volume ratio of the Ag-, Au or Al-rich phase to silicon carbide being greater than 4 and at least 60% of the diamond surface being covered by the silicon-carbon compound. Preferred production processes include atmospheric pressure and pressure-aided infiltration techniques. The component is suitable, in particular, as heat sink for semiconductor components.
Claims22
1-17. (canceled)
A heat sink component, comprising:
- a composite material having
- a diamond content of from 40 to 90% by volume with diamond grains having a mean size of from 5 to 300 μm;
- 0.005 to 12% by volume of a silicon-carbon compound;
- 7 to 49% by volume of an Ag-rich, Au-rich, or Al-rich phase;
- less than 5% by volume of a further phase;
- wherein a volume ratio of said Ag-rich, Au-rich, or Al-rich phase to said silicon-carbon compound is greater than 4, and wherein at least 60% of a surface of said diamond grains is covered by said silicon-carbon compound.
A method of producing a component, which comprises the following process steps:
- producing of an intermediate material containing diamond grains having a particle size of from 5 to 300 μm and a binder based on polymer or wax, and a proportion of the binder being from 1 to 20% by weight;
- shaping the intermediate material by introduction into a mold;
- producing a porous diamond body by heating the intermediate material to from 300° C. to 1200° C. in a protective gas atmosphere for at least partially pyrolyzing said binder;
- effecting an infiltration of the porous diamond body by heating the porous diamond body and a silicon-containing Ag, Au or Al alloy having Si content <40% by weight to a temperature above a liquidus temperature of the silicon-containing Ag, Au or Al alloy, with at least part of the silicon reacting with a carbon of the pyrolyzed binder and with diamond to form silicon carbide.
A method for producing a component, wherein the method comprises the following process steps:
- producing an intermediate comprising diamond grains having a particle size from 5 to 300 μm and a binder based on polymer or wax, with a proportion of binder being from 1 to 20% by weight;
- shaping the intermediate by introduction into a mold at atmospheric pressure or with the aid of a higher pressure;
- producing a porous diamond body by heating the intermediate to a temperature from 300° C. to 1200° C. in a protective gas atmosphere to pyrolyze the binder at least partially;
- heating a silicon-containing Ag, Au or Al alloy having an Si content of <40% by weight to a temperature above a liquidus temperature of the silicon-containing Ag, Au or Al alloy, and effecting a pressure infiltration of the porous diamond body.
Dependencies are inferred from the claim text.