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US 2006/0130757 A1Published application
Apparatus for active dispersion of precursors
OwnerYiCheng Liinventor
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Abstract
An apparatus for controlling precursor chemistry. The apparatus includes a chamber including a mixing space, at least one input coupled to the mixing space; and at least one output coupled to the mixing space. A motor subassembly coupled to the chamber and coupled to a mixing element in the mixing space. A controller coupled to the motor subassembly and to the chamber.
Claims13
An apparatus for controlling precursor chemistry, the apparatus comprising:
- a chamber including a mixing space, at least one input coupled to the mixing space, and at least one output coupled to the mixing space;
- a conduit conducting precursor gas to the at least one inlet;
- a motor subassembly coupled to the chamber;
- a mixing element in the mixing space coupled to the motor subassembly;
- and
- a controller coupled to the motor subassembly.
3 more elements
Dependencies are inferred from the claim text.