Alignment tool for precise pattern transfer
AssigneeAlces Technology, Inc.
InventorsMark Peterman, David Bloom
Life of this patent
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Abstract
Multi-point confocal microscopy, bright field microscope imaging, computer-controlled positioning stages, and an algorithm for automated leveling are the basis for a powerful but simple tool for aligning stamps used in precise pattern transfer to substrates. The system is relatively inexpensive and brings a capability similar to that of a photolithographic mask aligner to the world of elastomeric-stamp-based lithography. Alignment of the stamp and substrate is possible without contact between the two before printing.
Claims8
An alignment system for precise pattern transfer comprising:
- a microscope objective offset from an axis of a confocal optical detection system that provides spots of light on an imaged surface;
- an array detector for detecting brightness of one or more of the spots of light;
- and, one or more multi-axis positioning stages for positioning relative to one another:
- the microscope objective, a stamp, and a printing substrate according to the detected brightness.
An alignment system for precise pattern transfer comprising:
- one or more pinhole apertures in a confocal optical detection system;
- an image sensor for detecting the brightness of one or more images of the pinhole aperture(s);
- and, one or more multi-axis positioning stages for positioning relative to one another:
- a microscope objective, a stamp, and a substrate according to the detected brightness.
An alignment system for precise pattern transfer comprising:
- a confocal optical system for measuring the position of at least three points on the surface of a transparent stamp;
- one or more multi-axis positioning stages for positioning the stamp with respect to a substrate and the optical system;
- and, a bright-field imaging system for inspecting the stamp and the substrate simultaneously to facilitate alignment of the stamp to the substrate.
A method for performing precise pattern transfer comprising:
- inspecting the surfaces of a transparent stamp and a printing substrate by confocal microscopy to determine the relative position and orientation of the surfaces;
- using multi-axis positioning stages to position the surfaces parallel to one another;
- bringing the surfaces into close proximity to, but not touching, one another to facilitate alignment of features on the surfaces;
- and, moving the surfaces toward one another until they contact one another.
Dependencies are inferred from the claim text.