Acceleration sensor

An acceleration sensor, comprising:

• a support portion the lower end of which is fixed to a substrate and the upper end face of which includes a pad;
• four beam portions the respective one end of which is connected to the upper end portion of the support portion in an orthogonal direction with the support portion at the center and on which a detection element that applies changes to an output signal in correspondence with strain caused by acceleration acting on the detection element is formed;
• a suspended weight connected to the other end of the four beam portions;
• a support-portion extension part disposed between two adjacent beam portions of the four beam portions;
• and
• a stopper substrate with a window portion through which, in order to guide an output signal of the detection element via a pad that is formed on the upper end face of the support portion, a conductor lead that is connected to the pad passes,
• wherein the stopper substrate is fixed by means of adhesive to the extension of the support portion and limits upward overswing of the weight.

An acceleration sensor, comprising:

• a support portion the lower end of which is fixed to a substrate;
• four beam portions the respective one end of which is connected to the upper end portion of the support portion in an orthogonal direction with the support portion at the center and on which a detection element that applies changes to an output signal in correspondence with strain caused by acceleration acting on the detection element is formed;
• a suspended weight connected to the other end of the four beam portions;
• a support-portion extension that is disposed between two adjacent beam portions of the four beam portions;
• and
• a stopper substrate with a window portion through which, in order to guide an output signal of the detection element via a pad that is formed on the extension of the support portion, a conductor lead that is connected to the pad passes,
• wherein the stopper substrate is fixed by means of adhesive to the upper end face of the support portion and limits upward overswing of the weight.

An acceleration sensor, comprising:

• a support portion the lower end of which is fixed to a substrate;
• a beam portion on which a detection element for applying changes to an output signal in correspondence with strain caused by acceleration acting on the detection element is formed, one end of the beam portion being connected to the top part of the support portion;
• a suspended weight connected to the other end of the beam portion;
• a stopper substrate with a window portion through which, in order to guide an output signal of the detection element via a pad that is formed on the upper end face of the support portion, a conductor lead that is connected to the pad passes;
• and
• a frame portion that surrounds the weight,
• wherein the stopper substrate is fixed by means of adhesive to the upper end face of the frame portion and limits upward overswing of the weight.