Acceleration sensor
AssigneeOki Electric Industry Co., Ltd.
InventorTakayuki Kai
Life of this patent
Estimating the term…
Abstract
A acceleration sensor includes a supporting part, a beam part connected to the supporting part, a weight part connected to the beam part, and a protruding part formed beneath the beam part so that the protruding part supports the beam part. With such an arrangement, the adjustment of the sensitivity of the acceleration sensor can be easily performed, as well as the evaluation of the acceleration sensor.
Claims19
An acceleration sensor comprising:
- a supporting part;
- a beam part connected to said supporting part;
- a weight part connected to said beam part;
- and
- a protruding part formed beneath said beam part so that said protruding part supports said beam part.
An acceleration sensor comprising:
- a flexible beam part-having a first end and a second end;
- a supporting part connected to said first end of said beam part;
- a protruding part that supports said beam part;
- and
- a weight part including a weight connecting portion connected to said second end of said beam part and a supplemental weight portion disposed in the vicinity of said beam part and extending from said weight connecting portion toward said supporting part.
An acceleration sensor comprising a first layer and a second layer formed beneath said first layer,
- wherein said first layer comprises:
- a first supporting part;
- a first weight part including a first weight connecting portion and a first supplemental weight portion connected to said first weight connecting portion;
- a beam part connecting said first supporting part and said first weight connecting portion, and
- a first through hole that defines said first supporting part, said first weight part and said beam part,
- wherein said second layer comprises:
- a second supporting part formed beneath said first supporting part;
- a second weight part including a second weight connecting portion formed beneath said first weight connecting portion and a second supplemental weight portion formed beneath said first supplemental weight portion;
- a protruding part formed beneath said beam part, and
- a second through hole that defines said second supporting part, said second weight part and said protruding part,
- and wherein said protruding part supports said beam part.
An acceleration sensor comprising a first layer, a second layer formed provided beneath said first layer and a third layer formed beneath said second layer,
- wherein said first layer comprises:
- a first supporting part;
- a first weight part including a first weight connecting portion;
- a beam part connecting said first supporting part and said first weight connecting portion;
- a stopper part, and
- a first through hole that defines said first supporting part, said first weight part, said beam part and said stopper part,
- wherein said second layer comprises:
- a second supporting part formed beneath said first supporting part;
- a second weight part including a second weight connecting portion formed beneath said first weight connecting portion;
- a protruding part formed beneath said beam part, and
- a second through hole that defines said second supporting part, said second weight -part and said protruding part,
- wherein said third layer comprises:
- a third supporting part formed beneath said second supporting part;
- a third weight part including a third weight connecting portion formed beneath said second weight connecting portion and a supplemental weight portion connected to said third weight connecting portion,
- a third through hole that defines said third supporting part and said third weight part,
- and wherein said protruding part supports said beam part.
Dependencies are inferred from the claim text.