Method of fabricating mold for glass press
OwnerShuji Tanaka, Masayoshi Esashiinventors
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Abstract
A method of fabricating a mold for glass press, characterized in that silicon carbide is deposited on the surface of a silicon mold, subsequently the deposited silicon carbide is bonded to a silicon carbide substrate, and thereafter the silicon mold is removed by etching. In this method of fabricating a mold for glass press, the bonding between the silicon carbide deposited on the silicon mold surface and the silicon carbide substrate can be strengthened by interposing a metal thin film.
Claims11
A method of fabricating a mold for glass press, characterized in that a silicon carbide is deposited on the surface of a silicon mold, subsequently the deposited silicon carbide is bonded to a silicon carbide substrate, and thereafter the silicon mold is removed by etching.
A mold for glass press, wherein a silicon carbide layer having a minute structure as a mold for glass press on a surface is bonded to a silicon carbide substrate.
Dependencies are inferred from the claim text.