Photoacid generating polymer, its preparation method and top anti-reflective coating composition comprising the same
AssigneeHynix Semiconductor Inc.
InventorsJae Jung, Cheol Bok, Chang Lim, Seung Moon
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Abstract
Disclosed herein is a photoacid generating polymer represented by Formula 1 below: wherein R1 is a C1-10 hydrocarbon or a C1-10 hydrocarbon in which the hydrogen atoms are wholly or partly replaced by fluorine atoms; R2 is hydrogen or a methyl group; and a, b, c and d represent the mole fraction of each monomer and are in the range between about 0.05 and about 0.9, such that the sum of a, b, c, and d equals one. Since the photoacid generating polymer of Formula 1 is not water-soluble and acts as a photoacid generator, it can be used to prepare a top anti-reflective coating composition for immersion lithography.
Claims27
A photoacid generating polymer represented by Formula 1 below:
- wherein R1 is a C1-10 hydrocarbon or a C1-10 hydrocarbon in which the hydrogen atoms are wholly or partly replaced by fluorine atoms;
- R2 is hydrogen or a methyl group;
- and a, b, c and d represent the mole fraction of each monomer and are in the range between about 0.05 and about 0.9, such that the sum of a, b, and c equals one.
A method for preparing a poly(methylmethacrylic acid-t-butylacrylate-maleic anhydride-N-[(perfluoroalkanesulfonyl)oxy]-norbornene-2,3-dicarboximide) comprising:
- (1) dissolving a methylmethacrylic acid monomer, a t-butylacrylate monomer, a maleic anhydride monomer, an N-[(perfluoroalkanesulfonyl)oxy]-norbornene-2,3-dicarboximide monomer and a polymerization initiator in an organic solvent, and
- (2) subjecting the monomers to free-radical polymerization.
A top anti-reflective coating composition comprising:
- a photoacid generating polymer represented by Formula 1 below:
- wherein R1 is a C1-10 hydrocarbon or a C1-10 hydrocarbon in which the hydrogen atoms are wholly or partly replaced by fluorine atoms;
- R2 is hydrogen or a methyl group;
- and a, b, c and d represent the mole fraction of each monomer and are in the range between about 0.05 and about 0.9, such that the sum of a, b, c, and d equals one;
- a top anti-reflective coating polymer;
- and
- an organic solvent.
Dependencies are inferred from the claim text.