US 2006/0125884 A1Published application

Method of manufacturing liquid discharging head, and liquid discharging head

AssigneeCanon Kabushiki Kaisha

InventorsTamaki Sato, Maki Hatta, Kazuhiro Asai, Takumi Suzuki

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Abstract

The present invention provides an ink jet recording head forming method which can be improved in a discharging characteristic. The method includes at least the step of forming an ink flow path pattern on a substrate by a photodecomposable positive type resist resin, the step of once executing each of the steps of applying, exposing and baking thereon a nozzle-constituting resin layer which is a negative type resist containing an optical cation polymerization starting agent and having an epoxy resin as a chief component with respect to each of an ink flow path pattern and an ink discharge port pattern, the step of collectively developing unexposed portions on the respective nozzle-constituting resin layers, and the step of removing the formed photodecomposable resin. Therefore, a minute projection is formed at a location separate from the substrate surface side of the cross section of the ink discharge port and thus, the deviation of the flying direction of an ink droplet due to the asymmetry of the inner shape of the ink flow path is minimized.

Claims5

Dependent claims

A method of manufacturing a liquid discharging head having:

(1) the step of laminating a positive type resist on a substrate provided with an energy generating element, and forming a first flow path pattern by said positive type resist;
(2) the step of applying onto said positive type resist a first nozzle-constituting resin layer which is a negative type resist containing an optical cation polymerization starting agent and having an epoxy resin as a chief component, and forming a second flow path pattern in said first nozzle-constituting resin layer by exposure and baking;
(3) the step of applying onto said first nozzle-constituting resin layer a second nozzle-constituting resin layer which is a negative type resist containing an optical cation polymerization starting agent and having an epoxy resin as a chief component, and forming a discharge port pattern in said second nozzle-constituting resin layer by exposure and baking;
(4) the step of collectively developing unexposed portions on said first and second nozzle-constituting resin layers;
and
(5) the step of removing the first flow path pattern formed at said step (1);
wherein said second flow path pattern is larger than said discharge port pattern.

4 more elements

Dependencies are inferred from the claim text.