Compliant contact structure
AssigneeMicron Technology, Inc.
InventorsCharles Watkins, Kyle Kirby
Life of this patent
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Abstract
A compliant contact structure and contactor card for operably coupling with a semiconductor device to be tested includes a substantially planar substrate with a compliant contact formed therein. The compliant contact structure includes a portion fixed within the substrate and at least another portion integral with the fixed portion, laterally unsupported within a thickness of the substrate and extending beyond a side thereof. Dual-sided compliant contact structures, methods of forming compliant contact structures, a method of testing a semiconductor device and a testing system are also disclosed.
Claims9
A contact structure, comprising:
- a substantially planar substrate;
- and
- at least one conductive compliant contact including:
- a portion fixed within a portion of the substrate;
- and
- at least one laterally unsupported portion integral with the portion fixed within a recess in the substantially planar substrate, the recess extending peripherally about the at least one laterally unsupported portion of the at least one compliant contact.
Dependencies are inferred from the claim text.