Electromigration test device and electromigration test method
OwnerJochen Von Hageninventor
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Abstract
The invention relates to an electromigration test apparatus having a direct-current source 101 and an AC voltage source 102. Furthermore, it has a circuit 104 having a conductive structure 100, which is electrically coupled to the direct-current source 101 and the AC voltage source 102, and a measuring device for measuring an electrical parameter which is indicative of electromigration in the conductive structure. The AC voltage source 102 is set up in such a way that it exposes the conductive structure 100 to an alternating current, independently of a direct current, and thus heats the conductive structure 100 to a predetermined temperature.
Claims12
An electromigration test apparatus having:
- a direct-current source;
- an AC voltage source;
- a circuit having at least one conductive structure to be tested, which is electrically coupled to the direct-current source and the AC voltage source;
- and
- a measuring device, which is set up in such a way that the measuring device detects an electrical parameter which is indicative of electromigration in the conductive structure to be tested;
- the direct-current source being set up to expose the conductive structure to conditions which accelerate electromigration;
- the AC voltage source being set up in such a way that the AC voltage source exposes the conductive structure to be tested to an alternating current, independently of a direct current of the direct-current source and thus heats the conductive structure to be tested to a predetermined temperature that can be set.
A Method for testing a conductive structure for electromigration, having the following steps:
- electrically coupling a conductive structure to be tested to an electrical circuit electrically coupled to a direct-current source and an alternating-current source;
- supplying the conductive structure to be tested with a direct current which causes the electromigration within the conductive structure to be tested;
- heating the conductive structure to be tested by means of the alternating current to a predetermined temperature which can be set, the alternating current being independent of a direct current, the direct current bringing about the electromigration within the conductive structure to be tested;
- and
- detecting an electrical parameter which is indicative of the electromigration within the conductive structure to be tested.
Dependencies are inferred from the claim text.