Electrostatic capacitance detecting device

An electrostatic capacitance detection device for reading surface contours of an object by detecting an electrostatic capacitance, which changes according to a distance with the object, comprising:

• M individual power supply lines and N individual output lines, arranged in a matrix of M rows×N columns, and electrostatic capacitance detection elements provided on crossing points of the individual power supply lines and the individual output lines;
• a drain region of the MIS type thin film semiconductor device for signal amplification being electrically coupled to the individual power supply lines and the reference capacitor first electrode, and a gate electrode of the MIS type thin film semiconductor device for signal amplification being coupled to the capacitance detecting electrode and the reference capacitor second electrode,
• each of the electrostatic capacitance detection elements being formed of a signal detection element and a signal amplification element,
• the signal detection element being formed of a capacitance detecting electrode, a capacitance detecting dielectric layer and a reference capacitor,
• the reference capacitor being formed of a reference capacitor first electrode, a reference capacitor dielectric layer and a reference capacitor second electrode, and
• the signal amplification element being formed of a MIS type thin film semiconductor device for signal amplification, including a gate electrode, a gate insulating layer and a semiconductor layer.