Capacitor-less 1T-DRAM cell with Schottky source and drain
OwnerChih-Hsin Ko, Hung-Wei Chen +3inventors
InventorsChih-Hsin Ko, Hung-Wei Chen, Wen-Chin Lee, Min-Hwa Chi, Chung-Hu Ke
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OwnerChih-Hsin Ko, Hung-Wei Chen +3inventors
InventorsChih-Hsin Ko, Hung-Wei Chen, Wen-Chin Lee, Min-Hwa Chi, Chung-Hu Ke
Estimating the term…
A tunneling injection based Schottky source/drain memory cell comprising: a first semiconductor layer with a first conductivity type overlying an insulating layer, wherein the first semiconductor acts as a body region; a gate dielectric overlying the semiconductor layer; a gate electrode overlying the gate dielectric; a pair of spacers on sides of the gate electrodes; and a first Schottky barrier junction formed on a source region and a second Schottky barrier junction formed on a drain region on opposing sides of the body region. The source and the regions have an overlapping portion with the gate electrode and length of overlapping portion is preferably greater than about 5 Å. Interfacial layers are formed between the first and the second Schottky barrier regions.
A memory cell comprising:
A memory cell comprising:
A method of forming a memory cell, the method comprising:
Dependencies are inferred from the claim text.